Reflected and transmitted light illuminator for Inspection of large wafer and photomarks in the IC industry. The microscopes is equipped with a large size mechanical stage, smooth movement of ball bearing guides having low coaxial controls for x-y movement.
Objectives : M4x-M10x, M20x and M50x.
Eye pieces : WF10x and WF 15x.
Magnification : 40x to 750x.
Upright metallurgical microscopes
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